Portable Spectrograph PPDS above

Features and Benefits

  • Includes spectrograph, fiber optic cable, chamber connection, laptop computer and carry case
  • Versatile; use for troubleshooting, finger printing, chamber matching, and to verify tool endpoint detection system
  • Non-invasive, optical measuring technique does not break vacuum
  • Fast set-up; system can collect data within a few minutes after set-up
  • Configurable; select spectrograph type and accessories as required
  • Portable; all items pack within 17.75” (451mm) x 14.5” (386mm) x 12” (305mm) carry case
  • Easy-to-use; includes all items necessary for spectral data collection and analysis

 

 

Portable Spectrograph PPDS

Description: The heart of Verity’s Portable Plasma Diagnostic System is Verity’s spectrograph and SpectraView™ applications software. The carry case can be configured to include the specific items needed for your application. The choices for spectrograph include:

SD1024F™ – High Performance

  • For demanding applications Scientific grade CCD

SD1024FH™ – Super High Performance

  • • Same as SD1024F, except: o Higher throughput optics o Lower noise electronics

SD1024FL™ – General Purpose

  • For general purpose applications

SD2048DL™ – High Resolution

  • For high resolution applications
  • Bright plasma required

All items are enclosed within a compact carry case for portability and ease of use. Two different chamber connection types are included to provide a secure fiber optic connection to most chamber types.

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Verity Instruments, Inc.