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Spectrometer SD1024F™ above

Features and Benefits

• Provides robust endpoint determination
• SpectraView™ software provides:
  • Variety of algorithms
  • Open algorithms and sequences for flexibility
  • Tool integration via Ethernet, RS232, and DI/O
• Use for endpoint detection, fault detection, and process diagnostics
• 200–800nm range

Summary

SD1024F

• For demanding applications
• Single or multi-fiber input
• Scientific grade CCD
• ROHS Compliant

SD1024FH

• Same as SD1024F, except:
  • Higher throughput optics
  • Lower noise electronics

SD1024FL

• For general purpose applications

SD2048DL

• For high resolution applications
• Bright plasma required

Spectrometer Series

Spectrometers are optical emission monitors that integrate sophisticated embedded processors and software designed to provide intelligent instrument control, data acquisition and endpoint interface capabilities.

Consult Verity for availability as the spectrometers below are End of Life and are being replaced by the SD1024G Series

> SD1024F™    – High Performance
> SD1024FH™ – Ultra Performance
> SD1024FL™ – General Purpose
> SD2048DL™ – High Resolution
> Request Technical Specifications [PDF]
> Contact Sales@VerityInst.com

Spectrometer SD1024F™ – High Performance

Description: The SD1024F was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024F include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the element of the two-dimensional detector array.

Spectrometer SD1024FH™ – Ultra Performance

Description: The SD1024FH is the same as the SD1024F, except it uses lower noise electronics and high throughput optics. The SD1024FH was designed for the most demanding applications. Signal to Noise performance is achieved via a ~ 75% greater optical throughput, proprietary data acquisition scheme, novel signal processing methods, and superior system noise control.

Spectrometer SD1024FL™ – General Purpose

Description: The SD1024FL was designed for general purpose semiconductor process applications. It uses a 2048-element, one-dimensional CCD designed for cost effective operation. The CCD is phosphor coated for UV sensitivity. The SD1024FL uses a simple optical platform and the same 16-bit A/D electronics as the SD1024D.

Spectrometer SD2048DL™ – High Resolution

Description: The SD2048DL is nearly identical to the SD1024DL, but reports spectral data in 0.25nm increments instead of 0.5nm readings as in the SD1024D and SD1024DL. This is done by using a narrower inlet slit and modified embedded software parameters. Although the SD2048DL has better resolution than the SD1024DL, its sensitivity is diminished by about one order of magnitude.

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