Spectrograph SD1024D Spectrograph SD1024D above

Features and Benefits

  • Provides robust endpoint determination
  • SpectraView™ software provides:
    • Variety of algorithms
    • Open algorithms and sequences for flexibility
    • Tool integration via Ethernet, RS232, and DI/O
  • Use for endpoint detection, fault detection, and process diagnostics
  • 200–800nm range

Summary

SD1024D

  • For demanding applications
  • Single or multi-fiber input
  • Scientific grade CCD

SD1024DL

  • For general purpose applications

SD2048DL

  • For high resolution applications
  • Bright plasma required

 

 

Spectrograph SD1024D Series

Description: The SD1024D Series spectrographs are optical emission monitors that integrate sophisticated embedded processors and software designed to provide intelligent instrument control, data acquisition and endpoint interface capabilities. The SD1024D Series uses common electronics, application software and enclosures. The differences between the SD1024D, the SD1024DL, and the SD2048DL are the charge coupled device (CCD), optical platform and embedded software parameters.

The SD1024D was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024D include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the element of the two-dimensional detector array.


Spectrograph SD1024DL

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Description: The SD1024DL was designed for general purpose semiconductor process applications. It uses a 2048-element, one-dimensional CCD designed for cost effective operation. The CCD is phosphor coated for UV sensitivity. The SD1024DL uses a simple optical platform and the same 16-bit A/D electronics as the SD1024D.


Spectrograph SD2048DL

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> Contact Sales@VerityInst.com

Description: The SD2048DL is nearly identical to the SD1024DL, but reports spectral data in 0.25nm increments instead of 0.5nm readings as in the SD1024D and SD1024DL. This is done by using a narrower inlet slit and modified embedded software parameters. Although the SD2048DL has better resolution than the SD1024DL, its sensitivity is diminished by about one order of magnitude.

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