Spectral Reflectometer SP2003 above
Features and Benefits
- Designed for in-situ or in-line measurement of film thickness in etch, CMP and CVD applications
- Real-time measurement
- SD1024D Spectrograph provides:
- Excellent UV sensitivity
- Wide dynamic range
- Excellent S/N ratio
- Multi-fiber input capability
- Pulsed light source provides:
- In-situ measurement by subtraction of plasma
- Freeze-frame images in case of moving wafer
- High brightness for excellent S/N ratio
- SpectraView™ software provides:
- Robust endpoint and film thickness algorithms
- Open algorithms and sequences for flexibility
- Tool integration via Ethernet, RS232, and DI/O
- Usable range:
- Standard: 225-800nm
- Optional: <225-800nm
- Fringe-count, reflectivity and model-based algorithms
Spectral Reflectometer SP2003 Series
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Description: Verity's SP2003 Spectral Reflectometer is designed for a wide variety of film thickness applications, including those required in etch, CVD and CMP processes. Verity Spectral Reflectometers are successfully controlling hundreds of semiconductor process tools worldwide.
The key components of the SP2003 are the SD1024D spectrograph, FL2004 Xenon flashlamp, and SpectraViewT applications software.
The heart of the SP2003 is the SD1024D Spectrograph, which uses a scientific grade CCD detector for excellent dynamic range, UV detection capability, and low noise. The SD1024D also has capability for multi-fiber input operation, and controls the flashlamp.
The FL2004 flashlamp is a bright, broadband source useful for the applications described herein. The FL2004's output has a strong UV content thus enabling the measurement of relatively thin film layers that would not otherwise be possible using a reflectometer. Since a flashlamp is used, the motion of moving wafers does not result in the blurring of data, which enables more accurate measurement.
The SpectraViewT PC host application provides robust film thickness determination through a variety of "open" algorithms. SpectraViewT enables integration with tool-to-application-PC communication based on RS232, Ethernet or DI/O.
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