Spectral Reflectometer SP2006™ above
Features and Benefits
Spectral Reflectometer SP2006™ Series
Consult Verity for availability as the SP2006 is End of Life and is being replaced by the SP2100 Spectral Reflectometer.
Description: Verity's SP2006™ Spectral Reflectometer is designed for a wide variety of film thickness applications, including those required in etch, CVD and CMP processes. Verity Spectral Reflectometers are successfully controlling hundreds of semiconductor process tools worldwide.
The key components of the SP2006 are the SD1024F™ spectrometer, FL2006 Xenon flashlamp, and SpectraView™ applications software. The heart of the SP2006 is the SD1024F Spectrometer, which uses a scientific grade CCD detector for excellent dynamic range, UV detection capability, and low noise. The SD1024F also has capability for multi-fiber input operation, and controls the flashlamp. The
FL2006™ flashlamp is a bright, broadband light source useful for the applications described herein. The FL2006's output has a strong UV content thus enabling the measurement of relatively thin film layers that would not otherwise be possible using a reflectometer. Since a flashlamp is used, the motion of moving wafers does not result in the blurring of data, which enables more accurate measurement.
The SpectraView PC host application provides robust film thickness determination through a variety of "open" algorithms. SpectraView enables integration with tool-to-application-PC communication based on RS232, Ethernet or DI/O.