Features and Benefits
Manual — EP200Mmd™
Scanning — EP200Msd™ - discontinued
Description: The EP200™ Series monochromators are designed to measure a single wavelength of light in the range of 185–925nm. When used with Verity’s system controllers and the proper optical input path, the EP200 Series provides robust endpoint detection for production or research applications.
The EP200 Series is used extensively in semiconductor and related thin film applications for endpoint detection in etch, CVD etchback, photoresist stripping and related applications. The EP200Mmd is designed for manual adjustment of wavelengths. The EP200Msd permits computer-controlled spectral scanning through the use of a stepper motor, hardened lead screw assembly and position encoders. These elements allow the scanning monochromator to reposition itself for different wavelengths when a process recipe changes or a new product calls for monitoring a new endpoint emission. Performance of the EP200 Series monochromators is enhanced by its wide spectral range, superior wavelength resolution (up to 0.2nm) and extraordinary dynamic range of the photomultiplier tube (PMT).