Press Releases
Contact:
John Welch
Director of Sales & Marketing
Phone: 469-546-8007
Fax: 206-350-6277
Email: jwelch@verityinst.com
New NIR Spectrograph
Carrollton , Texas , April 3rd, 2006-- Verity Instruments, Inc. is pleased to announce the availability of a new Spectrograph, the SD512NIR, for measurement from 900 nm to 1700 nm. The SD512NIR is designed for use in OES (Optical Emission Spectroscopy) and IEP (Interferometric Endpoint) applications that require the measurement of wavelenghts in the NIR.
The SD512NIR features a very compact design and it employs a 512-element, Linear Indium Gallium Arsenide Photodiode Array. The advantages of the SD512NIR include excellent sensitivity over its entire range, user-selectable high sensitivity and high dynamic range modes, a three-stage thermoelectric cooler which reduces thermal noise, and an integrated blocking filter which eliminates 2nd and higher orders.
The SD512NIR is supplied with Verity's SpectraView™ application software, which is based upon the company's 25 years of experience in endpoint detection. The powerful SpectraView software provides a variety of open algorithms and user sequences. Tool integration is possible using RS232, Ethernet, and Digital I/0 communication.
The SD512NIR is the same form factor as the“defacto endpoint standard”, the SD1024D Series. The SD1024D Series is designed for use from 200 nm to 800 nm. The SD1024D Series consists of the high performance SD1024D which includes a scientific grade CCD that is TE cooled for low noise and backthinned for enhanced UV sensitivity. Other SD1024D Series products include the general purpose SD1024DL and high resolution SD2048DL.
Verity Instruments, Inc. is a leading supplier of instrumentation and software for optical endpoint determination as required in etch, CVD etchback, photoresist strip, CMP endpoint and related applications. Verity has been providing optical instruments for semiconductor processing since 1980. Additional information about the company and products can be found on Verity’s website at http://www.verityinst.com, at sales@verityinst.com, or by phone at (972) 446-9990.
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