Optical Endpoint
Detection Systems

Endpoint Detection

Verity Instruments is the leading supplier of optical endpoint detection systems to the Semiconductor Industry. We provide integrated solutions for endpoint detection, film thickness measurement, wafer state interferometry, fault detection and plasma diagnostics. In support of Advanced Process Control, our products are typically used in situ, providing real time control.

Over 30 Years
of Experience

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Verity Instruments is the leading supplier of optical endpoint detection systems to the Semiconductor Industry. We provide integrated solutions for endpoint detection, film thickness measurement, wafer state interferometry, fault detection and plasma diagnostics. In support of Advanced Process Control, our products are typically used in situ, providing real time control.

We’ve gone the extra mile, so you don’t go the extra nanometer.

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The next generation of endpoint detection spectrometers has arrived!

  • Redesigned
  • Ultra sensitive
  • Next generation technology
  • Models that eliminate dedicated PC
  • SD1024XTM – Lower Cost "Smart" Spectrometer – fully standalone, no applications PC required! This is the first industry spectrometer with monitor & keyboard connections.
  • SD512GRTM – Near Infrared Spectrometer – this instrument covers the range from 900 to 1700 nm.
  • SD2048GHTM – High Resolution, High Performance Spectrometer.
  • SE1024GL-CMOS - Value Line Spectrometer - this instrument covers the range from  200 to 800 nm

Our tools. Our instruments. Our software. Our methodology.