SD1024X Spectrometer

NIR Spectometer SD512GRTM

The SD512GR was designed for demanding semiconductor process applications. Its optical system employs a 512-element, linear Indium Gallium Arsenide Photodiode Array. The advantages of the SD512GR include excellent sensitivity over the 900 – 1700 nm range, user-selectable sensitivity, a thermoelectric cooler which reduces thermal noise, and an integrated blocking filter which eliminates second and higher orders.

Features & Benefits

  • 900- 1700 nm range
  • Provides robust endpoint determination
  • Can be used with existing SpectraView™ software
  • Use for endpoint detection, fault detection, process diagnostics, and as part of a spectral reflectometer