Spectrometer SD1024G

Spectrometer Series

Spectrometers are optical spectrum emission monitors that integrate sophisticated embedded processors and software designed to provide intelligent instrument control, data acquisition and endpoint detection capabilities.

All SD1024G Series Instruments are RoHS Compliant

We’ve gone the extra mile, so you don’t go the extra nanometer.

SD1024GTM

High Performance

The SD1024G was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024G include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the image plane of the two-dimensional detector array.

Features & Benefits

  • High performance
  • Provides robust endpoint determination
  • Can be used with existing SpectraView™ software
  • Use for endpoint detection, fault detection, and process diagnostics
  • 200 – 800 nm range
  • For demanding applications
  • Single or multi-fiber input
  • Scientific grade CCD
  • Low systematic noise
  • Similar optics as SD1024F
  • RoHS Compliant

SD1024GHTM

Ultra Performance

The SD1024GH incorporates special high throughput optics and lower systematic noise as compared to the SD1024G. The optics used in the SD1024GH increase optical throughput by about 75%. Accordingly, the SD1024GH is recommended for applications that require maximum signal to noise, especially when measuring relatively low intensity signals.

Features & Benefits

  • Ultra performance
  • Provides robust endpoint determination
  • Can be used with existing SpectraView™ software
  • Use for endpoint detection, fault detection, and process diagnostics
  • 200 – 800 nm range
  • For the most demanding applications
  • Same as SD1024G, except:
    • Higher throughput optics
      (similar to SD1024FH)
    • Lower systematic noise
  • RoHS Compliant

SD1024GLTM

General Purpose

The SD1024GL uses a general purpose CCD and was designed for general purpose semiconductor process applications.

Features & Benefits

  • Provides robust endpoint determination
  • Can be used with existing SpectraView™ software
  • Use for endpoint detection, fault detection, and process diagnostics
  • 200 – 800 nm range
  • For general purpose applications
  • Similar to SD1024FL
  • Uses different CCD from SD1024FL
  • RoHS Compliant

SD2048GLTM

High Resolution

The SD2048GH Series spectrometers are optical spectrum emission monitors that integrate sophisticated embedded processors and software designed to provide intelligent instrument control, data acquisition and endpoint detection capabilities. This spectrometer uses a 2048-element high performance CCD, the “H” high optical throughput optics, a narrower slit, and reports spectral data in 0.25 nm increments.

Features & Benefits

  • Provides robust endpoint determination
  • Can be used with existing SpectraView™ software
  • Use for endpoint detection, fault detection, and process diagnostics
  • 200 – 800 nm range
  • For high resolution applications
  • Bright source emission required
  • Similar to SD2048DL
  • Uses different CCD from SD2048DL
  • RoHS Compliant